AlN granule

ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.

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Product characteristics

High Purity

1

Ready for press

2

High strength

3

High sintering activity

4

High fluidity

5

技术参数


项目Item

GS-80

平均粒径 Mean particle size (μm) 

70~120

Y2O3 (WT%)

5

松装密度 Bulk density (g/cm3)

0.8~1.0

流动性 Fluidity (s/50g)

80~100

杂质含量
Impurity

Ca (ppm)

500

Si (ppm)

<100

Fe (ppm)

<30

成形工艺



脱脂工艺


200℃前3℃/ min ,400℃前2℃/ min,500℃前5℃/ min ,保温2小时。

烧结温度1830~1900℃,保温时间3~5 hrs,流动氮气,0.1MPa

产品应用

压制陶瓷原料:加热器/静电吸盘/刻蚀防护罩/热压氮化铝陶瓷


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