ALN granule is made by spray granulation of ALN powder, containing binder and sintering aids, which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.
Product characteristics
High Purity
Ready for press
High strength
High sintering activity
High fluidity
技术参数
项目Item | GS-80 | |
平均粒径 Mean particle size (μm) | 70~120 | |
Y2O3 (WT%) | 5 | |
松装密度 Bulk density (g/cm3) | 0.8~1.0 | |
流动性 Fluidity (s/50g) | 80~100 | |
杂质含量 | Ca (ppm) | <500 |
Si (ppm) | <100 | |
Fe (ppm) | <30 |
成形工艺
脱脂工艺
200℃前3℃/ min ,400℃前2℃/ min,500℃前5℃/ min ,保温2小时。
烧结温度1830~1900℃,保温时间3~5 hrs,流动氮气,0.1MPa
产品应用
压制陶瓷原料:加热器/静电吸盘/刻蚀防护罩/热压氮化铝陶瓷
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